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From MEMS to Bio-MEMS and Bio-NEMS
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Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
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Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
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Manufacturing Techniques for Microfabrication and Nanotechnology
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Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology
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Chemical Sensing with Solid State Devices
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Manufacturing Techniques for Microfabrication and Nanotechnology
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Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology
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Micro- and Nanofabrication with Carbon
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